Computation and experiments on the beam spread in the VP-SEM: Application to X-ray microanalysis

Journal of Trace and Microprobe Techniques

Volumn 21, Issue 2, 2003, Pages 229-238

  Kadoun, A ^a   Belkorissat, R ^a   Mathieu, C ^b   Khelifa, B ^b  

^a UNIVERSITY OF SIDI BEL ABBES   (Algeria)

^b UNIVERSITÉ D'ARTOIS   (France)

Author keywords

Electron scattering; Skirt effect; Variable pressure scanning electron microscope; X ray microanalysis

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; ELECTRON SCATTERING; HELIUM; MATHEMATICAL MODELS; MONTE CARLO METHODS; PRESSURE EFFECTS; X RAY ANALYSIS;

ELECTRON BEAM-GAS INTERACTION; VARIABLE PRESSURE SCANNING ELECTRON MICROSCOPY; X-RAY MICROANALYSIS;

SCANNING ELECTRON MICROSCOPY;

EID: 0038205908     PISSN: 07334680     EISSN: None     Source Type: Journal    
DOI: 10.1081/TMA-120020258     Document Type: Article

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