Reverse flow pressure limiting aperture

Microscopy and Microanalysis

Volumn 6, Issue 1, 2000, Pages 21-30

  Danilatos, Gerasimos D ^a  

^a ESEM Research Laboratory   (Australia)

Author keywords

Annular; Aperture; Differential; Environmental; Environmental scanning electron microscope; Jet; Pressure limiting aperture; Pump; Scanning electron microscope; Supersonic

Indexed keywords

EID: 0039598547     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927600000052     Document Type: Article

References (8)

1. Alexander P (1946) The theory of the mercury-vapour vacuum pump and a new high-speed pump. J Sci Instrum 23:11-16
2. Bier K, Hagena O (1963) Influence of shock waves on the generation of high-intensity molecular beams by nozzles, In: Rarefied Gas Dynamics, VoI 1, Laurmann J (ed). New York: Academic Press, pp 478-496
3. Bird GA (1995) Molecular Gas Dynamics and the Direct Simulation of Gas Flows. Oxford: Clarendon Press
4. Crawford WW (1917) The parallel jet vacuum pump. Phys Rev 10:557-563
5. Danilatos GD (1991) Gas flow properties in the environmental SEM, In: Microbeam Analysis - 1991, Howitt DG (ed). San Francisco: San Francisco Press, pp 201-203
6. Danilatos GD (1999) Differential pumping via core of annular supersonic jet. World Intellectual Property Organization, Patent Cooperation Treaty patent application. International Publication No. WO 99/27259, 3 June 1999
7. Ermolov VI, Kusner YS, Prikhod'ko VG (1985). Structure and pumping properties of the inner portion of a supersonic ring jet. Sov Phys Tech Phys 30:105-111
8. Langmuir I (1916) A high vacuum mercury vapour pump of extreme speed. Phys Rev 8:48-51