Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy

Journal of Electron Microscopy

Volumn 49, Issue 6, 2000, Pages 761-763

  Oho, Eisaku ^a   Asai, Natsuki ^a   Itoh, Sukehiro ^a,b  

^a KOGAKUIN UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Helium; Low vacuum; Low voltage; Scanning electron microscopy; Signal to noise ratio; Variable pressure

Indexed keywords

ELECTRONS; HELIUM; IMAGE ENHANCEMENT; SCANNING ELECTRON MICROSCOPY;

ACCELERATING VOLTAGES; BACKSCATTERED ELECTRON IMAGES; HELIUM GAS; IMAGE QUALITY IMPROVEMENTS; LOW VACUUM; LOW VOLTAGES; PRIMARY ELECTRON BEAMS; SRARIRIING ELECTRON MICROSCOPY; VARIABLE PRESSURE;

SIGNAL TO NOISE RATIO;

ARTICLE;

EID: 0034472758     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023869     Document Type: Article

References (9)

1. Electron scattering by gas in the scanning electron microscope
2. The use of helium gas to reduce beam scattering in high vapor pressure scanning electron microscopy applications
3. Reduction of noise in TV rate electron microscope images by digital filtering
4. New generation scanning electron microscopy technology based on the concept of active image processing
5. The theory of gaseous detector device in the environmental microscopes
6. Amplification measurements of alternative imaging gases in environmental SEM