The use of helium gas to reduce beam scattering in high vapour pressure scanning electron microscopy applications

Scanning

Volumn 20, Issue 1, 1998, Pages 57-60

  Stowe, S J ^a,c   Robinson, V N E ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b ETP Semra Pty Ltd   (Australia)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Electron scattering; Energy dispersive x ray analysis; Environmental scanning electron microscopy; Helium; Scanning electron microscopy; Variable pressure scanning electron microscope

Indexed keywords

ELECTRON SCATTERING; HELIUM; IMAGE ENHANCEMENT; IMAGE QUALITY; MICROSCOPES; X RAY ANALYSIS;

CALCIUM FLUORITE; COPPER IRON SULPHIDE; VARIABLE PRESSURE SCANNING ELECTRON MICROSCOPY;

SCANNING ELECTRON MICROSCOPY;

CALCIUM FLUORIDE; COPPER; HELIUM; SULFIDE;

ARTICLE; ATMOSPHERIC PRESSURE; ELECTRON BEAM; IMAGE QUALITY; MOLECULAR WEIGHT; PRESSURE CHAMBER; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY; VAPOR; X RAY ANALYSIS;

EID: 0031866412     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200109     Document Type: Article

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