A novel grounded coplanar waveguide with cavity structure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 140-143

  Yoshida, Yukihisa ^a   Nishino, Tamotsu ^a   Jiao, Jiwei ^a,b   Lee, Sang Seok ^a   Suehiro, Yoshiyuki ^a   Miyaguchi, Ken'ichi ^a   Fukami, Tatsuya ^a   Kimata, Masafumi ^a   Ishida, Osami ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC GROUNDING; ELECTRON DEVICE MANUFACTURE; MEMBRANES; MICROELECTROMECHANICAL DEVICES; SILICON NITRIDE; SILICON WAFERS; SUBSTRATES; SURFACES; TRANSMISSION LINE THEORY;

CAVITY STRUCTURE; GROUNDED COPLANAR WAVEGUIDE; SILICON NITRIDE MEMBRANE;

WAVEGUIDES;

EID: 0038156096     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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