A new micromachined overlay CPW structure with low attenuation over wide impedance ranges and its application to low-pass filters

IEEE Transactions on Microwave Theory and Techniques

Volumn 49, Issue 9, 2001, Pages 1634-1639

  Kim, H T ^a   Jung, S ^a   Park, J H ^a   Baek, C W ^a   Kim, Y K ^a   Kwon, Y ^a  

^a Seoul National University   (South Korea)

Author keywords

Coplanar waveguide; Low pass filter; Micromachining technology; Transmission line

Indexed keywords

OVERLAY-COPLANAR-WAVEGUIDE (OCPW);

ATTENUATION; ELECTRIC CONDUCTORS; ELECTRIC FIELDS; ELECTRIC IMPEDANCE; ELECTRIC LINES; LOW PASS FILTERS; MICROMACHINING; SUBSTRATES;

WAVEGUIDES;

EID: 0035445411     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.942577     Document Type: Article

References (13)

1. R.W. Jackson, "Considerations in the use of coplanarwaveguide for millimeter-wave integrated circuits," IEEE Trans. Microwave Theory and Tech., vol. MTT-34, pp. 1450-1456, Dec. 1986.
2. K. C. Gupta, R. Garg, I. Bahl, and P. Bhartia, Microstrip Lines and Slotlines. Norwood, MA: Artech House, 1996, ch. 7.
3. M. S. Shakouri, A. Black, B. A. Auld, and D. M. Bloom, "500 GHz GaAs MMIC sampling wafer probe," Electron. Lett., vol. 29, no. 6, pp. 557-558, Mar. 1993.
4. U. Bhattacharya, S. T. Allen, and M. J.W. Rodwell, "DC-725 GHz sampling circuits and subpicosecond nonlinear transmission lines using elevated coplanar waveguide," IEEE Microwave Guided Wave Lett., vol. 5, pp. 50-52, Feb. 1995.
5. A. Reichelt and I. Wolff, "New coplanar-like transmission lines for application in monolithic integrated millimeter-wave and submillimeter-wave circuits," in IEEE MTT-S Int. Microwave Symp. Dig., June 1998, pp. 99-102.
6. N. I. Dib, W. P. Harokopus, Jr., L. P. B. Katehi, C. C. Ling, and G. M. Rebeiz, "Study of a novel planar transmission line," in IEEE MTT-S Int. Microwave Symp. Dig., June 1991, pp. 623-626.
7. T. M. Weller, L. P. B. Katehi, and G. M. Rebeiz, "High performance microshield line components," IEEE Trans. Microwave Theory Tech., vol. 43, pp. 534-543, Mar. 1995.
8. T. Tokumitsu, T. Hiraoka, and H. Nakamoto, "Multilayer MMIC using a 3 μm ×3-layer dieletric film structure," in IEEE MTT-S Int. Microwave Symp. Dig., June 1990, pp. 831-834.
9. M. Gillick and I. D. Robertson, "Ultra low impedance CPW transmission lines for multilayer MMIC's," in IEEE MTT-S Int. Microwave Symp. Dig., June 1993, pp. 145-148.
10. H. T. Kim, S. Jung, J. H. Park, C.W. Baek, Y. K. Kim, and Y. Kwon, "A new micromachined overlap CPW structure with low attenuation over wide impedance ranges," in IEEE MTT-S Int. Microwave Symp. Dig., June 2000, pp. 299-302.
11. G. Matthaei, L. Young, and E. Jones, Microwave filters, Impedance Matching Networks, and Coupling Structures. Norwood, MA : Artech House, 1980.
12. M. Weller, K. J. Herrick, and L. P. B. Katehi, "Quasi-static design technique for mm-wave micromachined filters with lumped elements and series stubs," IEEE Trans. Microwave Theory Tech., vol. 45, pp. 931-937, June 1997.
13. K. Hettak, N. Dib, A. Omar, G. Deliies, M. Stubbs, and S. Toutain, "A useful new class of miniature CPW shunt stubs and its impact on millimeter-wave integrated circuits," IEEE Trans. Microwave Theory Tech., vol. 47, pp. 2340-2349, Dec. 1999.