Track-etch templates designed for micro- and nanofabrication

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 208, Issue 1-4, 2003, Pages 115-122

  Ferain, E ^a   Legras, R ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Latent track; Nanomaterial; Polycarbonate; Polyimide; Pore etching; Template

Indexed keywords

ETCHING; POLYCARBONATES; POLYIMIDES; POROUS MATERIALS; WIRE;

TRACK-ETCH TEMPLATES;

NANOTECHNOLOGY;

EID: 0038148704     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00637-2     Document Type: Conference Paper

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