Pore geometry of etched ion tracks in polyimide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 111, Issue 1-2, 1996, Pages 70-74

  Trautmann, C ^a   Bruchle W ^a   Spohr, R ^a   Vetter, J ^a   Angert, N ^a  

^a GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ETCHING; HYDROLYSIS; IONS; IRRADIATION; PH; POLYCONDENSATION; SODIUM COMPOUNDS; STABILITY; SYNTHESIS (CHEMICAL);

BULK ETCHING RATE; ETCH RATIO; ION FLUENCE; IONS TRACKS; KAPTON; PORE GEOMETRY; SODIUM HYPOCHLORITE;

POLYIMIDES;

EID: 0030121342     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01264-8     Document Type: Article

References (13)

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3. P. Vater, Nucl. Tracks Radiat. Meas. 15 (1988) 743.
4. S. Heise, Diplom thesis, Kernchemie Marburg (1990).
5. Zhu Tian-chen, R. Brandt, P. Vater and J. Vetter, Nucl. Tracks Radiat. Meas. 15 (1988) 771.
6. H. Inoue, H. Okamoto and Y. Hiraoka, Radiat. Phys. Chem. 29 (1987) 283.
7. 4 (saturated), but the obtained pores never were cylindrical shaped.
8. O. Wichterle, Allgemeine Chemie, Scientia Chimica 6 (Akademie Verlag, 1959).
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12. P. Apel, JINR Dubna and W. Enge, Univ. Kiel, private communication.
13. Patent Nr. DE 4210486 Cl, Verfahren zum Erzeugen von Mikrostrukturen (1993).