FEM assisted design and simulation of novel electrothermal actuators

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 400-403

  Deladi, S ^a   Krijnen, G ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Adhesion; FEM simulation; In plane; Out of plane; Stiction; Trimproph actuator

Indexed keywords

ADHESION; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; STICTION; TEMPERATURE CONTROL; TEMPERATURE DISTRIBUTION; TRIBOLOGY;

FINITE ELEMENT METHOD (FEM) SIMULATION; IN-PLANE MOTION; OUT-OF-PLANE MOTION; TRIMORPH ACTUATORS;

MICROACTUATORS;

EID: 0038138456     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. J.M. Noworolski, Sensors and Actuators A55, 65-69, 1996.
2. H. Tada, et.al., J. of Applied Physics, Vol.87, No. 9, 4189-4193, 2000.
3. H. Sehr, et.al., J. Micromech. Microeng. Vol.11, 1306-1310, 2001.
4. S. Deladi, et.al., Proc. ICCN'02, 326-329, 2002.
5. E.S. Kolesar, et.al., Thin Solid Films 355-356, 295-302, 1999.
6. M. Pai, etal., Sensors and Actuators 83, 237-243, 2000.
7. M. Bargmann, etal., Mat Res. Soc. Symp. Proc. Vol. 605, 235-240, 2000.
8. Y. Okada, et.al., J. Appl. Phys. 56/2, 314-320, 1984.
9. C.H. Pan, J. Micromechanics Microeng. 12, 548-555, 2002.
10. S. Deladi, etal., Proc. MME'02, 63-66, 2002.
11. M. Ataka, etal., J. of MEMS, Vol.2/4, 146-150, 1993.
12. S.D. Senturia, Microsystem Design, Kluwet Academic Publisher, ISBN 0-7923-7246-8, 2000.