Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 235-240

  Bargmann, Melissa ^a   Kumpel, Amy ^a   Tada, Haruna ^a   Nieva, Patricia ^b   Zavracky, Paul ^b   Miaoulis, Ioannis N ^a   Wong, Peter Y ^a  

^a TUFTS UNIVERSITY   (United States)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DEFLECTION (STRUCTURES); ELASTIC MODULI; HIGH TEMPERATURE EFFECTS; IMAGE ANALYSIS; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MICROELECTRONIC PROCESSING; THERMAL EXPANSION; THERMOMECHANICAL TREATMENT; THIN FILMS;

COEFFICIENT OF THERMAL EXPANSION; MICROELECTROMECHANICAL SYSTEMS; SILICON NITRIDE FILM; THERMAL PROCESSING;

SILICON NITRIDE;

EID: 0034516548     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. L. Buchaillot, E. Farnault, M. Hoummady, and H. Fujita, "Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method," Japaneese Journal of Applied Physics, Vol. 36, pp. L 794-L 797, 1997.
2. M. Hoummady, E. Farnault, H. Kawakatsu, and T. Masuzawa, "Applications of Dynamic Techniques for Accurate determination of Silicon Nitride Young's Moduli," 1997 International Conference on Solid-State Sensors and Actuators, pp. 615-618, 1997.
3. H. Tada, A. E. Kumpel, R. E. Lathrop, I. N. Miaoulis, and P. Y. Wong, "Novel Imaging System for Measuring Microscale Curvatures at High Temperatures," accepted for publication in Review of Scientific Instruments, 1999
4. H. Tada, A. E. Kumpel, R. E. Lathrop, P. Nieva, P. Zavracky, I. N. Miaoulis, and P. Y. Wong, "Thermal Expansion Coefficient of Polycrystalline Silicon and Silicon Dioxide Thin Films at High Temperatures," under revision for publication in Journal of Applied Physics, 1999.
5. P. H. Townsend and D. M. Barnett, "Elastic Relationships in Layered Composite Media With Approximation For the Case of Thin Films On a Thick Substrate," Journal of Applied Physics, Vol. 62, pp. 4438-4444, 1987.