Role of hydrogen in the separation of a porous Si layer in a layer transfer process

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 1, 2003, Pages 128-131

  Bilyalov, R ^a   Solanki, C S ^a   Poortmans, J ^a   Ulyashin, A ^b   Job, R ^b   Fahrner, W ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF HAGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HYDRODYNAMICS; HYDROGEN; KINETIC THEORY; MORPHOLOGY; POROSITY; PRESSURE; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEPARATION; TRANSMISSION ELECTRON MICROSCOPY;

HYDRODYNAMIC PRESSURE; LAYER TRANSFER PROCESS; SILICON FILM;

POROUS SILICON;

EID: 0038131006     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306487     Document Type: Conference Paper

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