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Materials Science and Engineering: B

Volumn 58, Issue 1-2, 1999, Pages 95-99

The role of hydrogen in the formation of porous structures in silicon

(2) Parkhutik, Vitali a Ibarra, Eduardo Andrade b

a UNIVERSITAT POLITÈCNICA DE VALÈNCIA (Spain)

b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

Author keywords

Dynamic mechanical stress; Porous silicon structures; Surface hydride complexes

Indexed keywords

ANODIC OXIDATION; DISSOLUTION; ELECTROLYTES; HYDRIDES; HYDROGEN; INFRARED SPECTROSCOPY; SILICON WAFERS; STRESS ANALYSIS;

DYNAMIC MECHANICAL STRESS; POST-ANODIZING CHEMICAL TREATMENT; SURFACE HYDRIDE COMPLEX;

POROUS SILICON;

EID: 0344210377 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(98)00297-9 Document Type: Article

Times cited : (17)

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