Integrated bulk/SOI APD sensor: Bulk substrate inspection with Geiger-mode avalanche photodiodes

Electronics Letters

Volumn 39, Issue 9, 2003, Pages 735-736

  Jackson, J C ^a   Donnelly, J ^a   O'Neill, B ^a   Kelleher, A M ^a   Healy, G ^a   Morrison, A P ^b   Mathewson, A ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; PHOTODETECTORS; PHOTODIODES; PLASMA ETCHING; SURFACE ROUGHNESS;

ACTIVE PIXEL SENSOR (APS) ARRAYS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0038057984     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20030490     Document Type: Article

References (8)

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2. BIBER, A., SEITZ, P., and JACKEL, H.: 'Avalanche photodiode image sensor in standard BiCMOS technology', IEEE Trans. Electron Devices, 2000, 47, (11), pp. 2241-2243
3. USAMI, A., KANEKO, K., FUJII, Y., and ICHIMURA, M.: 'Evaluation of the bonded silicon on insulator (SOI) wafer and the characteristics of PIN photodiodes on the bonded SOI wafer', IEEE Trans. Electron Devices, 1995, 42, (2), pp. 239-243
4. XU, C., ZHANG, W., and CHAN, M.: 'A low voltage hybrid bulk/SOI CMOS active pixel image sensor', IEEE Electron Device Lett., 2001, 22, (5), pp. 248-250
5. JACKSON, J.C., HURLEY, P.K., MORRISON, A. P., LANE, B., and MATHEWSON,A.: 'Comparing leakage currents and dark count rates in shallow junction Geiger-mode avalanche photodiodes', Appl. Phys. Lett., 2002, 80, (22), pp. 4100-4102
6. JACKSON, J.C., MORRISON, A.P., HURLEY, P.K., HARRELL, W.R., DAMJANOVIC, D., LANE, B., and MATHEWSON, A.: 'Process monitoring and defect characterization of single photon avalanche diodes'. Int. Conf. on Microelectronic Test Structures (ICMTS 2001), Kobe, Japan, March 2001
7. JACKSON, J.C., MORRISON, A.P., LANE, B., and MATHEWSON, A.: 'Characterisation of large area SPAD detectors operated in avalanche photodiode mode'. 13th Annual Lasers and Electro Optics Society Mtg, 2000, Vol. 1, pp. 17-18
8. JACKSON, J.C., MORRISON, A.P., LANE, B., SINNIS, V., and MATHEWSON, A.: 'Simulation of dark count in Geiger mode avalanche photodiodes'. Proc. IEEE Int. Conf. on Simulation of Semiconductor Processes and Devices, Athens, Greece, September 2001