Design of experiments optimization of PMMA for LIGA applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4690 II, Issue , 2002, Pages 1180-1187

  Singleton, Laurence ^a   Schenk, Rainer ^a   Haverbeck, Oliver ^a   Tunayer, Abdi ^a   Himmelsbach, Anja ^a   Krempel, Christiana ^a   Detemple, Peter ^a   Lacher, Manfred ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Deep X ray Lithography; Design of Experiments; DXRL; LIGA; PMMA

Indexed keywords

COMPOSITION; CRACK INITIATION; CROSSLINKING; ELECTROPLATING; INJECTION MOLDING; IRRADIATION; MASKS; MICROSTRUCTURE; OPTIMIZATION; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

DEEP X-RAY LITHOGRAPHY;

PHOTORESISTS;

EID: 0036030136     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474195     Document Type: Conference Paper

References (6)

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