Two axis-of-rotation mirror array using electromagnetic MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 275-278

  Bernstein, J ^a   Taylor, W P ^a   Brazzle, J ^a   Kirkos, G ^a   Odhner, J ^a   Pareek, A ^a   Zai, M ^a  

^a Corning IntelliSense Corporation ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MAGNETIC FIELDS; MAGNETIC MOMENTS; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; PERMANENT MAGNETS;

ELECTROMAGNETIC ACTUATION; TWO AXIS-OF-ROTATION MIRROR ARRAY;

MIRRORS;

EID: 0037818284     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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