Low Resistance Non-Alloy Ohmic Contact to p-Type GaN Using Mg-Doped InGaN Contact Layer

Physica Status Solidi (A) Applied Research

Volumn 188, Issue 1, 2001, Pages 363-366

  Kumakura, K ^a   Makimoto, T ^a   Kobayashi, N ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037815393     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200111)188:1<363::AID-PSSA363>3.0.CO;2-L     Document Type: Article

References (19)

1. J. K. KIM, J.-L. LEE, J. W. LEE, H. E. SHIN, Y. J. PARK, and T. KIM, Appl. Phys. Lett 73, 2953 (1998).
2. J.-S. JANG, S.-J. PARK, and T.-Y SEONG, J. Vac. Sci. Technol. B 17, 2667 (1999).
3. M. SUZUKI, T. KAWAKAMI, T. ARAI, S. KOBAYASHI, Y. KOIDE, T. UEMURA, N. SHIBATA, and M. MURAKAMI, Appl. Phys. Lett. 74, 275 (1999).
4. L. ZHOU, W. LANFORD, A. T. PING, I. ADESIDA, J. W. YANG, and A. KHAN, Appl. Phys. Lett. 76, 3451 (2000).
5. J.-S. JANG, S.-J. PARK, and T.-Y SEONG, Appl. Phys. Lett. 76, 2898 (2000).
6. J.-K HO, C.-S. JONG, C. C. CHIU, C.-N HUANG, C.-Y CHEN, and K.-K. SHIH, Appl. Phys. Lett. 74, 1275 (1959).
7. K. KUMAKURA and N. KOBAYASHI, Jpn. J. Appl. Phys. 38, L1012 (1999).
8. P. KOZODOY, M. HANSEN, S. P. DENBAARS, and U. K. MISHRA, Appl. Phys. Lett 74, 3681 (1999).
9. L. ZHOU, A. T. PING, F. KHAN, A. OSINSKY, and I. ADESIDA, Electron. Lett. 36, 91 (2000).
10. Y.-L. LI, E. F. SCHUBERT, J. W. GRAFF, A. OSINSKY, and W. F. SCHAFF, Appl. Phys. Lett. 76, 2728 (2000).
11. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, submitted to Appl. Phys. Lett.
12. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, Jpn. J. Appl. Phys. 39, L337 (2000).
13. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, J. Cryst. Growth 221, 267 (2000).
14. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, Jpn. J. Appl. Phys. 39, L195 (2000).
15. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, Mater. Res. Soc. 622, T5-11 (2000).
16. T. MAKIMOTO, K. KUMAKURA, and N. KOBAYASHI, J. Cryst. Growth 221, 350 (2000).
17. K. KUMAKURA, T. MAKIMOTO, and N. KOBAYASHI, Proc. Internat. Workshop Nitride Semiconductors (IWN2000), IPAP Conf. Series No. 1, 797 (2000).
18. T. MAKIMOTO, K. KUMAKURA, and N. KOBAYASHI, to be published in Appl. Phys. Lett.
19. A. BYKHOVSKI, B. GELMONT, and M. SHUR, J. Appl. Phys. 81, 6332 (1997).