Hydrogen distribution, nanostructures and optical properties of high deposition rate hot-wire CVD a-Si:H

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 95-99

  Baugh, Jonathan ^a   Wang, Keda ^a   Han, Daxing ^a   Wu, Yue ^a  

^a UNIVERSITY OF NORTH CAROLINA   (United States)

Author keywords

Amorphous silicon; Nanostructure; Nuclear magnetic resonance; Photoluminescence

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH FROM MELT; HYDROGEN; NANOSTRUCTURED MATERIALS; NUCLEAR MAGNETIC RESONANCE; PHOTOLUMINESCENCE; SILANES;

HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);

AMORPHOUS SILICON;

EID: 0037809534     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00080-4     Document Type: Conference Paper

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