Low temperature growth and characterization of (Na,K)NbOx thin films

Journal of Crystal Growth

Volumn 254, Issue 3-4, 2003, Pages 400-404

  Kugler, Veronika M ^a   Söderlind, Fredrik ^a   Music, Denis ^a   Helmersson, Ulf ^a   Andreasson, Johanna ^b   Lindbäck, Ture ^b  

^a LINKÖPING UNIVERSITY   (Sweden)

^b LULEÅ UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

A1. Characterization; A3. Physical vapor deposition processes; B1. Niobates; B2. Dielectric materials

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELASTIC MODULI; HARDNESS; LOW TEMPERATURE PHENOMENA; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; PERMITTIVITY; PEROVSKITE; PHYSICAL VAPOR DEPOSITION; SILICA; X RAY DIFFRACTION ANALYSIS;

SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 0037809404     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01184-9     Document Type: Article

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