Vertical Coupled-Cavity Microinterferometer on GaAs with Deformable-Membrane Top Mirror

IEEE Photonics Technology Letters

Volumn 7, Issue 4, 1995, Pages 382-384

  Larson, M C ^a   Harris, J S ^a   Pezeshki, B ^b  

^a STANFORD UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CIRCUIT RESONANCE; MIRRORS; OPTOELECTRONIC DEVICES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR LASERS; TUNING; VOLTAGE CONTROL;

DEFORMABLE MEMBRANE TOP MIRRORS; MICROINTERFEROMETERS; VERTICAL CAVITY OPTOELECTRONIC STRUCTURES;

INTERFEROMETERS;

EID: 0029288525     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/68.376809     Document Type: Article

References (8)

1. J. L. Jewell, J. P. Harbison, A. Scherer, Y. H. Lee, and L. T. Florez, “Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization”, IEEE J. Quantum Electron., vol. 27, pp. 1332–1346, 1991.
2. R. H. Yan, R. J. Simes, and L. A. Coldren, “Electroabsorptive Fabry—Perot reflection modulators with asymmetric mirrors”, IEEE Photon. Technol. Lett. vol. 1, pp. 273–275, 1989.
3. C. Gmachl, A. Koeck, M. Rosenberger, E. Gornik, M. Micovic, and J. F. Walker, “Frequency tuning of a double-heterostructure AIGaAs/GaAs-vertical-cavity suface-emitting laser by a serial integrated in-cavity modulator diode”, Appl. Phys. Lett., vol. 62, pp. 219–221, 1993.
4. T. Wipiejewski, K. Panzlaff, E. Zeeb, and K. J. Ebeling, “Tunable extremely low threshold vertical-cavity laser diodes”, IEEE Photon. Technol. Lett., vol. 5. pp. 889–892, 1993.
5. K. Aratani, P. J. French, P. M. Sarro, R. F. Wolffenbuttel and S. Middelhoek, “Process and design considerations for surface microma-chined beams for a tuneable interferometer array in silicon”, in Proc. IEEE Micro Electro Mechanical Systems, Ft. Lauderdale. FL, 1993, pp. 230-235.
6. K. W. Goossen, J. A. Walker, and S. C. Amey, “Silicon modulator based on mechanically-active anti-reflection layer for fiber-in-the-loop applications”, in Proc. Optical Fiber Conf. Tech. Dig. (OFC 94), San Jose, CA, 1994, Paper PD10, 1994.
7. J. H. Jerman, D. J. Clift, and S. R. Mallinson, “A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support”, Sensors and Actuators A, vol. 29, pp. 151–158, 1991.
8. N. Takeshima, K. J. Gabriel, M. Ozaki, J. Takahashi, H. Horiguchi, and H. Fujita, “Electrostatic parallelogram actuators”, 1991 Int. Conf. Solid-State Sensors and Actuators Dig. Tech. Papers (Transducers ‘91), San Francisco, CA, 1991, pp. 63–66.