Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 230-235

  Aratani, K ^a   French, P J ^a   Sarro, P M ^a   Wolffenbuttel, R F ^a   Middlehoek, S ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MODULATORS;

FABRY-PEROT INTERFEROMETER; SURFACE MICROMACHINED BEAMS; TUNEABLE INTERFEROMETER ARRAY;

INTERFEROMETERS;

EID: 0027186798     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)