Miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques.

Volumn , Issue , 1988, Pages 16-18

  Jerman, J H ^a   Mallinson, S R ^a  

^a IC Sensors Subsidiary of MSI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS -- COMPONENTS; MIRRORS; PRESSURE TRANSDUCERS; SENSORS; SILICON AND ALLOYS -- MACHINING;

ACCELERATION SENSORS; MICROMACHINING; MINIATURE FABRY-PEROT INTERFEROMETER; NEAR-INFRARED INTERFEROMETER; OPTICAL WAVELENGTH DEMULTIPLEXERS;

INTERFEROMETERS;

EID: 0024144754     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)