SCOPUS 정보 검색 플랫폼

Volumn 7, Issue 5, 2001, Pages 193-195

Cyclopentadienyl Germanes as novel precursors for the CVD of thin Germanium films

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037719264 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(200109)7:5<193::AID-CVDE193>3.0.CO;2-M Document Type: Article

Times cited : (9)

References (13)

1
- 0001519430
- M. Lill, B. Schröder, Appl. Phys. Lett. 1999, 74, 1284.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1284
- Lill, M.¹ Schröder, B.²

2
- 0033689423
- S. Bozzo, J.-L. Lazzari, C. Coudreau, A. Ronda, F. Arnaud d'Avitaya, J. Derrien, S. Mesters, B. Hollaender, P. Gergaud, O. Thomas, J. Cryst. Growth 2000, 276, 171.
- (2000) J. Cryst. Growth , vol.276 , pp. 171
- Bozzo, S.¹ Lazzari, J.-L.² Coudreau, C.³ Ronda, A.⁴ D'Avitaya, F.A.⁵ Derrien, J.⁶ Mesters, S.⁷ Hollaender, B.⁸ Gergaud, P.⁹ Thomas, O.¹⁰

3
- 0027906881
- W. Paul, J. H. Chen, E. Z. Liu, A. E. Westel, P. Wickboldt, J. Non-Cryst. Solids 1993, 164-166, 1.
- (1993) J. Non-cryst. Solids , vol.164-166 , pp. 1
- Paul, W.¹ Chen, J.H.² Liu, E.Z.³ Westel, A.E.⁴ Wickboldt, P.⁵

4
- 0031117526
- Z. Meng, Z. Jin, B. A. Gururaj, P. Chu, H. S. Kwok, M. Wong, J. Electrochem. Soc. 1997, 144, 1423.
- (1997) J. Electrochem. Soc. , vol.144 , pp. 1423
- Meng, Z.¹ Jin, Z.² Gururaj, B.A.³ Chu, P.⁴ Kwok, H.S.⁵ Wong, M.⁶

5
- 0031710378
- J. El Boucham, F. Maury, R. Morancho, J. Anal. Appl. Pyrolysis 1998, 44, 153.
- (1998) J. Anal. Appl. Pyrolysis , vol.44 , pp. 153
- El Boucham, J.¹ Maury, F.² Morancho, R.³

6
- 0038898287
- S. Vepřek, J. Prokop, F. Glatz, R. Merica, F. R. Klingan, W. A. Herrmann, Chem. Mater. 1996, 8, 825.
- (1996) Chem. Mater. , vol.8 , pp. 825
- Vepřek, S.¹ Prokop, J.² Glatz, F.³ Merica, R.⁴ Klingan, F.R.⁵ Herrmann, W.A.⁶

7
- 0003612389
- Eds: N. Auner, J. Weis, Wiley-VCH, Weinheim
- F. Hamelmann, A. Klipp, S. H. A. Petri, G. Haindl, J. Hartwich, U. Kleineberg, P. Jutzi, U. Heinzmann, in Organosilicon Chemistry -From Molecules to Materials IV (Eds: N. Auner, J. Weis), Wiley-VCH, Weinheim 2000.
- (2000) Organosilicon Chemistry -from Molecules to Materials IV
- Hamelmann, F.¹ Klipp, A.² Petri, S.H.A.³ Haindl, G.⁴ Hartwich, J.⁵ Kleineberg, U.⁶ Jutzi, P.⁷ Heinzmann, U.⁸

8
- 0003592014
- F. Hamelmann, A. Klipp, G. Haindl, J. Hartwich, U. Kleineberg, P. Jutzi, U. Heinzmann, Chem. Vap. Deposition 2000, 6, 63.
- (2000) Chem. Vap. Deposition , vol.6 , pp. 63
- Hamelmann, F.¹ Klipp, A.² Haindl, G.³ Hartwich, J.⁴ Kleineberg, U.⁵ Jutzi, P.⁶ Heinzmann, U.⁷

9
- 0032715741
- F. Hamelmann, A. Klipp, G. Haindl, J. Hartwich, U. Kleineberg, P. Jutzi, U. Heinzmann, Thin Solid Films 1999, 338, 70.
- (1999) Thin Solid Films , vol.338 , pp. 70
- Hamelmann, F.¹ Klipp, A.² Haindl, G.³ Hartwich, J.⁴ Kleineberg, U.⁵ Jutzi, P.⁶ Heinzmann, U.⁷

10
- 0000366206
- J. Pola, J. P. Parsons, R. Taylor, J. Chem. Soc., Faraday Trans. 1992, 88, 1637.
- (1992) J. Chem. Soc., Faraday Trans. , vol.88 , pp. 1637
- Pola, J.¹ Parsons, J.P.² Taylor, R.³

11
- 0003668179
- Eds: M. D. Allendorf, C. Bernard, The Electrochemical Society, Pennington, NJ
- 2. T. Bolom, F. Glatz, S. Vepřek, M. G. J. Vepřek-Heijman, in Proc. 14th Int. Conf. on CVD and EVROCVD-11 (Eds: M. D. Allendorf, C. Bernard), The Electrochemical Society, Pennington, NJ 1997, p. 294.
- (1997) Proc. 14th Int. Conf. on CVD and EVROCVD-11 , pp. 294
- Bolom, T.¹ Glatz, F.² Vepřek, S.³ Vepřek-Heijman, M.G.J.⁴

12
- 0039491053
- Ph.D. Thesis, Universität Bielefeld, Germany
- J. Dahlhaus, Ph.D. Thesis, Universität Bielefeld, Germany 1993.
- (1993)
- Dahlhaus, J.¹

13
- 0038898288
- unpublished
- K. Dittmar, J. Dahlhaus, P. Jutzi, unpublished.
- Dittmar, K.¹ Dahlhaus, J.² Jutzi, P.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.