Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine

Chemistry of Materials

Volumn 8, Issue 4, 1996, Pages 825-831

  Veprek S ^a   Prokop, J ^a   Glatz, F ^a   Merica, R ^a   Klingan, F R ^a   Herrmann, W A ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038898287     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9503801     Document Type: Article

References (19)

1. Veprek, S., Glatz, F.; Konwitschny, R. J. Non-Cryst. Solids 1991, 137 and 138, 779.
2. Wickboldt, P.; Jones, S. J.; Marques, F. C.; Pang, D ; Turner, W. A.; Wetsel, A. E.; Paul, W. Philos. Mag. 1991, B64, 655.
3. Karg, F. H.; Hirschauer, B.; Kasper, W.; Pierz, K. Sol. Energy Mater. 1991, 22, 169.
4. Glatz, F.; Konwitschny, R.; Veprek-Heijman, M. G. J.; Veprek, S. Mater. Res. Soc. Symp. Proc. 1994, 336, 499.
5. Veprek, S.; Veprek-Heijman, M G. J. Appl Phys. Lett. 1990, 56, 1766.
6. Veprek, S.; Ambacher, O.; Vanecek, M. Mater. Res. Soc. Symp. Proc. 1992, 258, 45.
7. Neumann, W. P. Chem. Rev. 1990, 90, 1.
8. Herrmann, W. A.; Denk, M.; Behm, J.; Scherer, W.; Klingan, F. R.; Bock, H.; Solouki, B.; Wagner, M. Angew. Chem. 1992, 104, 1489; Angew. Chem., Int. Ed. Engl. 1992, 31, 1485.
9. Herrmann, W. A.; Denk, M.; Behm, J.; Scherer, W.; Klingan, F. R.; Bock, H.; Solouki, B.; Wagner, M. Angew. Chem. 1992, 104, 1489; Angew. Chem., Int. Ed. Engl. 1992, 31, 1485.
10. Heineman, C.; Herrmann, W. A.; Thiel, W. J. Organomet. Chem. 1994, 475, 73.
11. Klingan, F.-R. Diploma Work, Technical University Munich, 1992.
12. Klingan, F.-R. Ph.D. Thesis, Technical University Munich, 1995.
13. Glatz, F.; Prokop, J.; Veprek, S.; Klingan, F.-R.; Herrmann, W. A. Mater. Res. Soc. Symp. Proc. 1994, 336, 541.
14. Turner, W. A.; Jones, S. J.; Pang, D.; Bateman, B F.; Chen, J H.; Li, Y.-M ; Marques, F. C.; Wetsel, A. E.; Wickboldt, P.; Paul, W.; Bodart, J.; Norberg, R. E.; El Zawawi, I.; Theye, M. L. J. Appl. Phys. 1990, 67, 7430.
15. Madan, A.; Shaw, M. P. The Physics and Applications of Amorphous Semiconductors; Academic Press: Boston, 1988.
16. Klingan, F. R.; Prokop, J., unpublished results, 1994.
17. Glatz, F Ph.D. Thesis, Technical University Munich, 1993.
18. Prokop, J. Ph.D. Thesis, Technical University Munich, 1995.
19. Veprek, S.; Sarott, F.-A.; Rambert, S.; Taglauer, E. J. Vac. Sci Technol. 1989, A7, 2614.