Thermal decomposition mechanisms of tetraethylgermane in metal-organic chemical vapor deposition

Journal of Analytical and Applied Pyrolysis

Volumn 44, Issue 2, 1998, Pages 153-165

  El Boucham, J ^a,b   Maury, F ^a   Morancho, R ^a  

^a CNRS   (France)

^b MOULAY ISMAIL UNIVERSITY   (Morocco)

Author keywords

Gas phase analyses; Germanium thin films; On line gas chromatographic analyses; Pyrolysis of tetraethylgermane

Indexed keywords

GAS CHROMATOGRAPHY; GAS FUEL ANALYSIS; GERMANIUM COMPOUNDS; HYDROGEN; HYDROGENATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OLEFINS; POLYMERIZATION; THIN FILMS;

ONLINE GAS CHROMATOGRAPHY; TETRAETHYLGERMANE;

PYROLYSIS;

EID: 0031710378     PISSN: 01652370     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0165-2370(97)00077-6     Document Type: Article

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