On smoothing three-dimensional Monte Carlo ion implantation simulation results

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 22, Issue 7, 2003, Pages 879-883

  Heitzinger, Clemens ^a   Hössinger, Andreas ^a   Selberherr, Siegfried ^a  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

Author keywords

Approximation methods; Integrated circuit ion implantation; Monte Carlo methods; Polynomials

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; COMPUTER SIMULATION; ION IMPLANTATION; MONTE CARLO METHODS; POLYNOMIALS; THEOREM PROVING; THREE DIMENSIONAL;

BERNSTEIN POLYNOMIALS; RESPONSE SURFACE METHOD;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0037698165     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2003.814259     Document Type: Article

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