Free-standing InAs/InGaAs microtubes and microspirals on InAs (100)

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 1 A/B, 2003, Pages

  Vorob'ev, Alexander ^a   Prinz, Victor ^a   Preobrazhenskii, Valerii ^a   Semyagin, Boris ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

AlSb; Free standing microobjects; InAs; Selective etching; Semiconductor microtubes

Indexed keywords

ARRAYS; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON GAS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SUBSTRATES; TWO DIMENSIONAL;

FREE STANDING MICROOBJECTS; MICROSPIRALS; MICROTUBES; SEMICONDUCTING INDIUM ARSENIDE;

NANOSTRUCTURED MATERIALS;

EID: 0037667846     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l7     Document Type: Letter

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