Interferometric determination of the diameter of a silicon sphere using a direct optical frequency tuning system

IEEE Transactions on Instrumentation and Measurement

Volumn 52, Issue 2, 2003, Pages 631-635

  Kuramoto, Naoki ^a   Fujii, Kenichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Density; Optical frequency tuning; Optical interferometry; Single crystal silicon

Indexed keywords

HELIUM NEON LASERS; PHASE LOCKED LOOPS; PHASE SHIFT; SEMICONDUCTOR LASERS; SILICON; SINGLE CRYSTALS;

EXTERNAL CAVITY DIODE LASER; OPTICAL FREQUENCY TUNING SYSTEM; PHASE SHIFTING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0037561433     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2003.811683     Document Type: Article

References (12)

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