A novel interferometer for dimensional measurement of a silicon sphere

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 563-565

  Arnold Nicolaus, R ^a   Bönsch, Gerhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Avogadro; Density measurement; Phase shifting interferometry; Single crystal silicon; Size measurement; Sphere

Indexed keywords

ALGORITHMS; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ELECTROMAGNETIC WAVE INTERFERENCE; ENVIRONMENTAL CHAMBERS; IMAGE ANALYSIS; INTERFEROMETERS; INTERFEROMETRY; PHASE SHIFT; SINGLE CRYSTALS; SIZE DETERMINATION; SPHERES; VOLUME MEASUREMENT;

AVOGADRO'S CONSTANT; SPHERICAL FIZEAU INTERFEROMETERS;

SILICON;

EID: 0031122760     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.571915     Document Type: Article

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