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Volumn 63, Issue 11, 1992, Pages 5320-5325
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Interferometric measurements of the diameters of a single-crystal silicon sphere
a a a a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALS;
DISTANCE MEASUREMENT;
LASER APPLICATIONS;
SEMICONDUCTING SILICON;
FABRY-PEROT ETALON;
SINGLE CRYSTALS;
INTERFEROMETERS;
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EID: 0026943915
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1143447 Document Type: Article |
Times cited : (36)
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References (19)
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