Defect structure of SiNx:H films and its evolution with annealing temperature

Journal of Applied Physics

Volumn 88, Issue 4, 2000, Pages 2149-2151

  Martinez F L ^a   Del Prado, A ^a   Martil I ^a   Bravo, D ^b   Lopez F J ^b  

^a UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037540760     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1305548     Document Type: Article

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