Electron microscopy and nanolithography with an integrated low-energy electron beam

Applied Physics Letters

Volumn 75, Issue 12, 1999, Pages 1807-1809

  Zlatkin, A ^a   Garcia N ^b  

^a DAYFISA   (Spain)

^b CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037530776     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124827     Document Type: Article

References (14)

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2. T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, J. Vac. Sci. Technol. B 14, 3774 (1996).
3. K. Y. Lee, S. A. Rishton, and T. H. P. Chang, J. Vac. Sci. Technol. B 12, 3425 (1994).
4. M. Despont, U. Staufer, C. Stebler, R. Germann, and P. Vettiger, Microelectron. Eng. 27, 467 (1995).
5. T. H. P. Chang, M. G. R. Thomson, M. L. Yu, E. Kratschmer, H. S. Kim, K. Y. Lee, S. A. Rishton, and S. Zolgharnain, Microelectron. Eng. 32, 113 (1996).
6. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, J. Vac. Sci. Technol. B 13, 2498 (1995).
7. C. Stebler, M. Despont, U. Staufer, T. H. P. Chang, K. Y. Lee, and S. A. Rishton, Microelectron. Eng. 30, 45 (1996).
8. N. García and H. Rohrer, J. Phys.: Condens. Matter 1, 3737 (1989); V. T. Binh and N. García, J. Phys. I 1, 605 (1991); Ultramicroscopy 42-44, 80 (1992).
9. N. García and H. Rohrer, J. Phys.: Condens. Matter 1, 3737 (1989); V. T. Binh and N. García, J. Phys. I 1, 605 (1991); Ultramicroscopy 42-44, 80 (1992).
10. N. García and H. Rohrer, J. Phys.: Condens. Matter 1, 3737 (1989); V. T. Binh and N. García, J. Phys. I 1, 605 (1991); Ultramicroscopy 42-44, 80 (1992).
11. V. T. Binh, N. García, and S. Purcell, Advances in Imaging and Electron Physics (Academic, New York, 1996), Vol. 95, p. 63.
12. A. Zlatkin and N. García, Microelectron. Eng. 45, 39 (1999).
13. The microlens has been fabricated by P. Legagneux and D. Pribat at Thomson (France) within the EU ESPRIT Project "MicroGun" according to the lens layout and bore dimensions which were defined in the FSP laboratory and in FISINTEC (Spain). The final stage of lens processing has been performed at FSP where the lenses were subjected to special thermal and electric-field treatment to achieve the necessary breakdown strength.
14. Details on EPR formulation can be found in P. Argitis, I. Raptis, C. J. Aidinis, N. Glezos, M. Baciocchi, J. Everett, and M. Hatzakis, J. Vac. Sci. Technol. B 13, 3030 (1995).