Low-energy (300 eV) versatile scanning electron microscope with 30 nm resolution

Microelectronic Engineering

Volumn 45, Issue 1, 1999, Pages 39-46

  Zlatkin, A ^a   Garcia N ^a  

^a CSIC   (Spain)

Author keywords

Electron optics; Lithography; Microcolumn; Scanning electron microscope

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON LENSES; ELECTRON OPTICS; OPTICAL RESOLVING POWER;

MICROCOLUMNS;

SCANNING ELECTRON MICROSCOPY;

EID: 0033077943     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00260-3     Document Type: Article

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3. T.H.P. Chang, M.G.R. Thomson, M.L. Yu, E. Kratschmer, H.S. Kim, K.Y. Lee, S.A. Rishton, S. Zolgarnain, Microelectronic Engineering 32 (1996) 113.
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