Preparation of B-doped a-Si1-xCx:H films and heterojunction p-i-n solar cells by the Cat-CVD method

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 245-248

  Chikusa, K ^a   Takemoto, K ^a   Itoh, T ^a   Yoshida, N ^a   Nonomura, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

Amorphous silicon carbide films; Cat CVD method; Solar cells

Indexed keywords

AMORPHOUS SILICON; CATALYSIS; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); FILM GROWTH; HETEROJUNCTIONS; SILICON CARBIDE; SOLAR CELLS;

SOURCE GAS;

THIN FILMS;

EID: 0037513239     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00116-0     Document Type: Conference Paper

References (8)

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