Drastic revolution in catalytic CVD using "catalytic plate" instead of "hot wire"

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

  Masuda, A ^a   Ishibashi, Y ^a   Matsumura, H ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL VAPOR DEPOSITION; HEAT RADIATION; RATE CONSTANTS; SURFACE REACTIONS; TRANSPORT PROPERTIES;

CATALYTIC CHEMICAL VAPOR DEPOSITION (CAT CVD); DEPOSITION RATE;

FILM PREPARATION;

EID: 0034428311     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-609-a6.3     Document Type: Conference Paper

References (8)