In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide

Thin Solid Films

Volumn 426, Issue 1-2, 2003, Pages 238-245

  Zudans, I ^a   Seliskar, C J ^a   Heineman, W R ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

Acid etching; Ellipsometry; In situ; Indium tin oxide

Indexed keywords

ELLIPSOMETRY; ETCHING; LIGHT ABSORPTION; MULTILAYERS;

SENSOR FILM DYNAMICS;

THIN FILMS;

EID: 0037463264     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00029-4     Document Type: Article

References (21)

1. Shi Y., Slaterback A.F., Seliskar C.J., Heineman W.R. Anal. Chem. 69:1997;3679.
2. Shi Y., Seliskar C.J., Heineman W.R. Anal. Chem. 69:1997;4819.
3. Shi Y., Seliskar C.J. Chem. Mater. 9:1997;821.
4. Gottesfeld S. Bard A.J. Electroanalytical Chemistry. 15:1989;143 Marcel Dekkar, New York.
5. Gottesfeld S., Kim Yeon-Tak, Redendo A. Rubinstein I. Physical Electrochemistry: Principles, Methods and Applications. 1995;393 Marcel Dekkar, New York.
6. Woollam J.A., Johs B., Herzinger C.M., Hilfiker J., Synowicki R., Bungay C.L. Crit. Rev. Opt. Sci. Technol. CR72:1999;3.
7. Blaine J., Woollam J.A., Herzinger C.M., Hilfiker J., Synowicki R., Bungay C.L. Crit. Rev. Opt. Sci. Technol. CR72:1999;28.
8. Hilfiker J.N., Thompson D.W., Hale J.S., Woollam J.A. Thin Solid Films. 270:1995;73.
9. Hilfiker J.N., Glenn D.W., Heckens S., Woolam J.A. J. Appl. Phys. 79:1996;6193.
10. Arwin H. Thin Solid Films. 313-314:1998;764.
11. Hilfiker J.N., Theses M.S. Electrical Engineering. 1995;University of Nebraska, USA, Nebraska, USA.
12. Johs B., French R.H., Kalk F.D., McGahan W.A., Woollam J.A. Proc. SPIE. 2253:1994;1098.
13. Johs B., Hale J., Ianno N.J., Herzinger C.M., Tiwald T., Woollam J.A. Proc. SPIE. 4449:2001;41.
14. Dobrowolski J.A., Li L., Hilfiker J.N. Appl. Opt. 38:1999;4891.
15. Synowicki R.A. Thin Solid Films. 313-314:1998;394.
16. Gerfin T., Grätzel M. J. Appl. Phys. 79:1996;1722.
17. Scholten M., van den Meerakker J.E.A.M. J. Electrochem. Soc. 140:1993;471.
18. van den Meerakker J.E.A.M., Baarslag P.C., Scholten M. J. Electrochem. Soc. 142:1995;2321.
19. Vink T.J., Walrave W., Daams J.L.C., Baarslag P.C., van den Meerakker J.E.A.M. Thin Solid Films. 266:1995;145.
20. van den Meerakker J.E.A.M., Baarslag P.C., Walrave W., Vink T.J., Daams J.L.C. Thin Solid Films. 266:1995;152.
21. Palik Edward D. Handbook of Optical Constants of Solids II. 1991;Academic Press, Boston.