Defect structures in TaSi2 thin films produced by co-sputtering

Acta Materialia

Volumn 51, Issue 8, 2003, Pages 2285-2296

  Inui, H ^a   Fujii, A ^a   Hashimoto, T ^a   Tanaka, K ^a   Yamaguchi, M ^a   Ishizuka, K ^b  

^a KYOTO UNIVERSITY   (Japan)

^b Higashimatsuyama   (Japan)

Author keywords

Crystal structure; Phase transformation; Sputtering; Thin film; Transmission electron microscopy

Indexed keywords

ANNEALING; CRYSTALLIZATION; DEFECTS; PHASE TRANSITIONS; SPUTTERING; TANTALUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

DEFECT STRUCTURES;

THIN FILMS;

EID: 0037425394     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(03)00034-X     Document Type: Article

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