DTRMC, a probe of transverse transport in microcrystalline silicon

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 335-339

  Kasouit, S ^a,b   Rca i Cabarrocas, P ^a   Vanderhaghen, R ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b NONE   (France)

Author keywords

Electrical properties and measurements; Plasma processing and deposition; Silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARRIER MOBILITY; DIFFUSION; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; MICROWAVES; SEMICONDUCTING SILICON;

MICROWAVE CONDUCTIVITY;

NANOSTRUCTURED MATERIALS;

EID: 0037416731     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01204-X     Document Type: Conference Paper

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