Capacitance techniques for the evaluation of electronic properties and defects in disordered thin film semiconductors

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 127-132

  Kleider, J P ^a  

^a UNIV PARIS SUD   (France)

Author keywords

Capacitance; Defects; Density of states; Microcrystalline silicon; Polymorphous silicon

Indexed keywords

AMORPHOUS SILICON; CAPACITANCE; CHEMICAL BONDS; CRYSTAL DEFECTS; ELECTRONIC DENSITY OF STATES; HYDROGENATION; POLYSILICON; THIN FILMS;

POLYMORPHOUS SILICON;

SEMICONDUCTING FILMS;

EID: 0037416724     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01158-6     Document Type: Conference Paper

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