SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 101-107

Parametric investigation of SLS-processed poly-silicon thin films for TFT applications

(4) Crowder, M A a Moriguchi, M a Mitani, Y a Voutsas, A T a

a SHARP LABORATORIES OF AMERICA (United States)

Author keywords

Poly silicon thin films; Sequential lateral solidification; Thin film transistors

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; ELECTRON MOBILITY; LASER BEAM EFFECTS; LASER PULSES; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; THIN FILMS;

SEQUENTIAL LATERAL SOLIDIFICATION (SLS);

THIN FILM TRANSISTORS;

EID: 0037416534 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)01147-1 Document Type: Article

Times cited : (45)

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