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Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

Sequential lateral solidification of PECVD and sputter deposited a-Si films

(4) Crowder, M A a Sposili, R S a Limanov, A B a Im, J S a

a Columbia University ^* (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; DEHYDROGENATION; HIGH TEMPERATURE EFFECTS; MELTING; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SPUTTER DEPOSITION;

SEQUENTIAL LATERAL SOLIDIFICATION;

AMORPHOUS FILMS;

EID: 0034428520 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-621-q9.7.1 Document Type: Conference Paper

Times cited : (5)

References (13)

1
- 0032045953
- (1998) Physica Status Solidi , vol.166 , pp. 603
- Im, J.S.¹ Crowder, M.A.² Sposili, R.S.³ Leonard, J.P.⁴ Kim, H.J.⁵ Yoon, J.H.⁶ Gupta, V.V.⁷ Song, H.J.⁸ Cho, H.S.⁹

2
- 0000897114
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2864
- Sposili, R.S.¹ Im, J.S.²

3
- 0031162501
- (1997) Appl. Phys. Lett. , vol.70 , pp. 3434
- Im, J.S.¹ Sposili, R.S.² Crowder, M.A.³

4
- 0002796303
- edited by P. L. F. Hemment (Kluwer Academic Publishers, New York)
- (2000) Perspectives, Science and Technologies for Novel Silicon on Insulator Devices , pp. 55-61
- Limanov, A.B.¹ Borisov, V.M.² Vinokhodov, A.Y.³ Demin, A.I.⁴ El'tsov, A.I.⁵ Kirukhin, Y.B.⁶ Khristoforov, O.B.⁷

5
- 0040569167
- (1999) Thin Solid Films , vol.337 , pp. 129
- Kohler, J.R.¹ Dassow, R.² Bergmann, R.³ Krinke, J.⁴ Strunk, H.P.⁵ Werner, J.H.⁶

6
- 0004205669
- Kluwer Academic Publishers, New York
- (1988) Polycrystalline silicon for integrated circuit applications
- Kamins, T.¹

7
- 0004297203
- to be published in these proceedings
- New excimer laser crystallization system for conducting the sequential lateral solidification (SLS) process
- Sposili, R.S.¹ Crowder, M.A.² Im, J.S.³

8
- 0001261638
- Flat Panel Display Materials II, edited by M. K. Hatalis, J. Kanicki, C.J. Summers, and F. Funada (Pittsburg, Penn.)
- (1997) Mater. Res. Soc. Proc. , vol.424 , pp. 127-140
- Pribat, D.¹ Legagneux, P.² Plais, F.³ Reita, C.⁴ Petinot, F.⁵ Huet, O.⁶

9
- 0001290762
- (1997) J. Appl. Phys. , vol.82 , pp. 4086
- Brotherton, S.D.¹ McCulloch, D.J.² Gowers, J.P.³ Ayres, J.R.⁴ Trainor, M.J.⁵

10
- 0027307489
- Microcrystalline semiconductors: materials science and devices, edited by P. M. Fauchet, C. C. Tsai, L. T. Canham, I. Shimizu, and Y. Aoyagi (Pittsburg, Penn.)
- (1994) Mater. Res. Soc. Proc. , vol.283 , pp. 703
- Kim, H.J.¹ Im, J.S.² Thompson, M.O.³

11
- 0028409580
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2303
- Im, J.S.¹ Kim, H.J.²

12
- 36449004108
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1969
- Im, J.S.¹ Kim, H.J.² Thompson, M.O.³

13
- 4644266604
- (1999) Metals and Materials , vol.5 , pp. 525
- Yoon, J.H.¹ Im, J.S.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.