Sequential lateral solidification of ultra-thin a-Si films

Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

  Cho, H S ^a   Kim, D ^a   Limanov, A B ^a   Crowder, M A ^a   Im, J S ^a  

^a Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; ELECTRIC BREAKDOWN OF SOLIDS; EPITAXIAL GROWTH; INTERFACES (MATERIALS); IRRADIATION; LASER PULSES; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SOLIDIFICATION; TRANSMISSION ELECTRON MICROSCOPY;

SEQUENTIAL LATERAL SOLIDIFICATION (SLS);

ULTRATHIN FILMS;

EID: 0034428445     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-621-q9.9.1     Document Type: Conference Paper

References (13)