Error propagation in fixed-point ellipsometric inversions

Measurement Science and Technology

Volumn 14, Issue 4, 2003, Pages 516-522

  Easwarakhanthan, T ^a   Pigeat, P ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Correlation; Ellipsometry; Optical properties; Thin films

Indexed keywords

CORRELATION METHODS; MATRIX ALGEBRA; OPTICAL FILMS; OPTICAL PROPERTIES; SUBSTRATES;

ELLIPSOMETRIC INVERSIONS;

ELLIPSOMETRY;

FILM; MEASUREMENT METHOD;

EID: 0037390688     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/4/316     Document Type: Article

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