An algorithm for analyzing ellipsometric data taken with multiple angles of incidence

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 51-56

  Comfort, J C ^a   Urban III, F K ^b   Barton, D ^a  

^a FLORIDA INTERNATIONAL UNIVERSITY   (United States)

^b Florida International University   (United States)

Author keywords

Ellipsometry

Indexed keywords

ALGORITHMS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; RELIABILITY; STATISTICAL METHODS;

INCIDENT ANGLES;

ELLIPSOMETRY;

EID: 0030398022     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09186-9     Document Type: Article

References (3)

1. A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, New York, 1977.
2. F.K. Urban III and J.C. Comfort, Thin Solid Films, 253 (1994) 262-268.
3. J.C. Comfort and F.K. Urban III, Thin Solid Films, 270 (1995) 78-84.