Numerical calibration of the angle of incidence in ellipsometers

Measurement Science and Technology

Volumn 7, Issue 5, 1996, Pages 768-775

  Easwarakhanthan, T ^a   Ravelet, S ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR ANALYSIS; REFRACTIVE INDEX; SUBSTRATES; THIN FILMS;

ELLIPSOMETERS; INCIDENCE ANGLE; NUMERICAL CALIBRATION;

ELLIPSOMETRY;

EID: 0030150462     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/5/008     Document Type: Article

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