Ellipsometric methods for absorbing layers: A modified downhill simplex algorithm

Thin Solid Films

Volumn 289, Issue 1-2, 1996, Pages 54-58

  Bosch, S ^a   Monzonis F ^a   Masetti, E ^a,b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b ENEA   (Italy)

Author keywords

Downhill simplex algorithm; Ellipsometry; Single wavelength ellipsometry

Indexed keywords

ALGORITHMS; CONVERGENCE OF NUMERICAL METHODS; DEPOSITION; SUBSTRATES; THIN FILMS;

ABSORBING LAYER; DOWNHILL SIMPLEX ALGORITHM; INCIDENCE ANGLE; SINGLE WAVELENGTH ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 0030285382     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08933-X     Document Type: Article

References (11)

1. S. Bosch and F. Monzonís, J. Opt. Soc. Am. A, 12 (1995) 1375-1379.
2. T. Easwarakhanthan, C. Michel and S. Ravelet, Surf. Sci., 197 (1988) 339-345.
3. F.K. Urban III, Appl. Opt., 32 (1993) 2339-2344.
4. W.H. Press, S.A. Teukolsky, W.T. Wetterling, B.P. Flannery, Numerical Recipes in C, Cambridge University, Cambridge, 2nd. edn., 1992, Chapters 10 and 15.
5. A.R. Reinberg, Appl. Opt., 11 (1972) 1273.
6. S.S. So, Surf. Sci., 56 (1976) 97.
7. S. Bosch, Surf. Sci., 289 (1993) 411-417.
8. S. Bosch and F. Monzonís, Surf. Sci., 321 (1994) 156-160.
9. R.M.A. Azzam and N.M. Bashara, Ellipsometry and polarized light, North-Holland Publishers, Amsterdam, 1977, Chapter 4.
10. G.E. Jellison Jr., Thin Solid Films, 234 (4) (1993) 416-422.
11. E. Masetti and M.P. de Silva, Thin Solid Films, 246 (1994) 47.