Composition influence on the properties of sputtered Sn-W-O films

Sensors and Actuators, B: Chemical

Volumn 89, Issue 3, 2003, Pages 225-231

  Zampiceni, E ^a   Comini, E ^a   Faglia, G ^a   Sberveglieri, G ^a   Kaciulis, S ^b   Pandolfi, L ^b   Viticoli, S ^b  

^a UNIVERSITY OF BRESCIA   (Italy)

^b CNR   (Italy)

Author keywords

AFM; Depth profiling; Gas sensing; Gas sensor; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; METALLIC FILMS; RHEOLOGY; SPUTTERING; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS SENSING;

THIN FILMS;

EID: 0037374743     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00469-0     Document Type: Article

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