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Volumn 89, Issue 3, 2003, Pages 225-231

Composition influence on the properties of sputtered Sn-W-O films

Author keywords

AFM; Depth profiling; Gas sensing; Gas sensor; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; METALLIC FILMS; RHEOLOGY; SPUTTERING; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037374743     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00469-0     Document Type: Article
Times cited : (20)

References (23)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.