Si/SiO2 multilayers: Synthesis by reactive magnetron sputtering and photoluminescence emission

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 16, Issue 3-4, 2003, Pages 517-522

  Ternon, C ^a   Gourbilleau, F ^a   Rizk, R ^a   Dufour, C ^a  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

Author keywords

Microstructure; Photoluminescence; Reactive sputtering; Si SiO2 multilayers

Indexed keywords

AMORPHOUS SILICON; BAND STRUCTURE; LIGHT EMISSION; MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; SEMICONDUCTOR QUANTUM WELLS; SILICA; SYNTHESIS (CHEMICAL);

INTERFACIAL POTENTIAL;

SEMICONDUCTING SILICON;

EID: 0037371799     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00632-X     Document Type: Conference Paper

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