Gas sensing properties of semiconductor heterolayer sensors fabricated by slide-off transfer printing

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 41-47

  Hyodo, Takeo ^a   Mori, Tomonori ^a   Kawahara, Akihiko ^b   Katsuki, Hiroaki ^b   Shimizu, Yasuhiro ^a   Egashira, Makoto ^a  

^a NAGASAKI UNIVERSITY   (Japan)

^b Saga Ceramics Research Laboratory   (Japan)

Author keywords

H2; Heterolayer; NOx; Semiconductor gas sensor; Slide off transfer printing

Indexed keywords

ALUMINA; HYDROGEN; NITROGEN OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; TITANIUM DIOXIDE;

SEMICONDUCTOR HETEROLAYER SENSORS; SLIDE-OFF TRANSFER PRINTING;

CHEMICAL SENSORS;

EID: 0035876269     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00670-0     Document Type: Article

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