Low energy ion assisted carbon film growth: Methods and mechanisms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 910-917

  Ullmann, Jens ^a,b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPUTER SIMULATION; DENSIFICATION; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; MAGNETRON SPUTTERING; RAMAN SCATTERING;

FILTERED VACUUM CATHODIC ARC EVAPORATION (VA); ION ASSISTED EVAPORATION (IAE); MASS SEPARATED ION BEAM DEPOSITION (MSIBD);

AMORPHOUS FILMS;

EID: 0031547826     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00030-X     Document Type: Article

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