Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

Integrated Ferroelectrics

Volumn 24, Issue 1, 1999, Pages 139-146

  Maiwa, H ^a   Maria, J P ^a   Christman, J A ^b   Kim, S H ^a   Streiffer, S K ^c   Kingon, A I ^a  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTAL SYMMETRY; CRYSTALLOGRAPHY; DEPOSITION; ELECTROSTRICTION; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; TEXTURES;

COMPOSITION DEPENDENCE; FILM THICKNESS; LEAD ZIRCONATE TITANATE; NEAR MORPHOTROPIC SYMMETRY; RHOMBOHEDRAL SYMMETRY; TETRAGONAL SYMMETRY;

THIN FILMS;

EID: 0033295902     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908215586     Document Type: Article

References (14)

1. S. Trolier-McKinstry, J. F. S. Jr., T. Su, G. Zavala, and J. Fendler, Ferroelectrics 206-207, 381-392 (1997).
2. A. L. Kholkin, C. Wütchrich, D. V. Taylor, and N. Setter, Rev. Sci. Instrum. 67(5), 1935-1941 (1996).
3. 3 thin films (Kluwer Academic Publishers, Netherlands, 1995).
4. S. Watanabe, T. Fujiu, and T. Fujii, Appl. Phys. Lett. 66 (12), 1481-1483 (1995).
5. F. Xu, F. Chu, J. F. S. Jr., and S. Trolier-McKinstry, Proc. Symp. Mater. Res. Soc. 493, 47-52 (1998).
6. H. D. Chen, K. R. Udayakumar, C. J. Gaskey, and L. E. Cross, Appl. Phys. Lett. 67 (23), 3411-3413 (1995).
7. X. Du, J. Zheng, U. Belegundu, and K. Uchino, Appl. Phys. Lett. 72 (19), 2421-2423 (1998).
8. K. Lefki and G. J. M. Dormans, J. Appl. Phys. 76 (3), 1764-1767 (1994).
9. J. A. Christman, R. R. W. Jr., A. I. Kingon, and R. J. Nemanich, Appl. Phys. Lett. 73 (26), 3851-3853 (1998).
10. F. Jona and G. Shirane, Ferroelectric Crystals (Dover Publications Inc., Mineola, NY, 1962).
11. B. Jaffe, W. R. Cook, and H. Jaffe, Piezoelectric Ceramics (R. A. N. Publishers, Marietta, OH, 1971).
12. A. Kholkine, Proc. Int. Symp. Ferroic Domains and Mesoscopic Structures (ISFD-5) To be published in Ferroelectrics (1998).
13. D. Damjanovic, M. Demartin, F. Chu, and N. Setter, Proc. IEEE Ultrasonics Symposium, 251-257 (1996).
14. S. Streiffer, To be published (1999).